[time-nuts] Capacitive temperature sensing
Bruce Griffiths
bruce.griffiths at xtra.co.nz
Sat Aug 23 09:04:11 UTC 2008
Mike Monett wrote:
> Hi Bruce,
>
> Thanks for the info. I looked at Physik Instrumente, and their
> performance is truly impressive. For example, the D-510.020
> single-electrode capacitive sensor has a nominal range of 20 um, and
> a sensor active area of 11.2 mm^2:
>
> http://www.physikinstrumente.com/en/pdf/D510_Datasheet.pdf
>
> According to my calculations, that works out to a capacitance of
> about 4.95 pf.
>
> They show a resolution for this sensor of <0.001%, which is 20e-6 *
> 0.001 * 0.01 * 1e9 = 0.2 nm.
>
> The change in capacitance is 4.95 * 0.001 * 0.01 = 0.0000495pf,
> which is quite amazing. That is a very small change.
>
> If the nominal sensor voltage was 1 volt, this represents a change
> of 1 * 0.001 * 0.01 = 0.00001 Volt, or 10 uV, which is quite
> acceptable for good S/N.
>
> One problem might be long-term drift. The temperature coefficients
> and other errors are in the hundreds of ppm, whereas the tolerance
> in interferometry are down to 0.1 ppm.
>
> It is interesting to note they use Zygo ZMI-2000 and ZMI-1000 laser
> interferometers in their calibration labs, presumably for long-term
> accuracy:
>
>
> http://www.physikinstrumente.com/en/products/nanopositioning/test_calibration.php
>
> Also, they use flat plate capacitors in the sensors. I don't know
> how well this would work on a thin column of mercury surrounded by a
> glass dielectric.
>
> But this is new information to me, and I am quite impressed with the
> performance. Thank you for posting the information.
>
> Regards,
>
> Mike Monett
>
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>
Mike
One technique would be to use the mercury column as the central plate of
a differential capacitor.
Alternatively use a large cylindrical sleeve to make a high capacitance
connection to the mercury column and use a position sensing cylindrical
sleeve surrounding the set point.
Temperature compensation can be achieved by using a reference capacitor
of similar construction by metal coating the bore of a similar glass
capillary.
Since this is a fixed setpoint device it need not have a large dynamic
range.
Thus a tempco of 100ppm need not be an issue if the range is small
enough and the reference capacitor shares the same tightly regulated
thermal environment.
Cylindrical geometry variable capacitors can be made to work quite well,
Syndenham covers this as well as the parallel plate variety.
Bruce
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